Microsensors

Esquema

Getty AAT: Objects Facet

Jerarquía

Furnishings and Equipment (Hierarchy Name) > Measuring Devices (Hierarchy Name) > measuring devices (instruments) > <measuring devices for extent> > sensors

Descripción

Any miniaturized probe with physical dimensions in the submicrometer to millimeter range. Microsensors are manufactured using microelectromechanical systems (MEMS) technology.

URI original del concepto

http://vocab.getty.edu/aat/300379785

Otros términos

  • microsensor [en]
  • micro-sensor [en]